SEMICONDUCTOR MANUFACTURING FAULT DETECTION AND MANAGEMENT SYSTEM AND METHOD

Patent №

US 7,089,072

Granted

2006-08-08

Filed 2004

Owner

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Lab

AI components

2

planning · hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10853790

The present disclosure provides a semiconductor manufacturing fault detection and management system and method for monitoring at least one manufacturing entity to detect state changes.

PlanningAI hardwareG05B 23/0227G05B 2219/32179G05B 2219/32207G05B 2219/32221G05B 2219/32385G05B 2219/45031Y02P 90/02

AI classification

Planning1.00
AI hardware0.72
Evolutionary computation0.04
Knowledge representation0.02
Natural language0.01
Machine learning0.00
Speech0.00
Vision0.00

Ownership

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

assignment · 153850084

Assignors

CHIA, TONG-LUNG

On an employer assignment, the assignors are typically the inventors.

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