Patent №
US 7,587,296
Granted
2009-09-08
Filed 2007
Owner
APPLIED MATERIALS, INC.
Lab
—
AI components
3
ml · planning · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11800471
A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate statistic of the one or more multivariate statistical models if the change is greater than a threshold value. The one or more multivariate statistical models are used to analyze subsequent process data to detect faults.
AI classification
Ownership
APPLIED MATERIALS, INC.
assignment · 199130710
Assignors
HARVEY, JERRY LYNN, JR., SCHWARM, ALEXANDER T.
On an employer assignment, the assignors are typically the inventors.