SYSTEMS AND METHODS FOR CROSS-INTRABAY TRANSPORT

Patent №

US 7,720,564

Granted

2010-05-18

Filed 2006

Owner

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Lab

AI components

1

kr

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11358470

A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.

Knowledge representationH01L 21/67276H10P 72/0612G05B 19/4189G06Q 10/08H01L 21/67727H10P 72/3216G05B 2219/31281G05B 2219/45031+1 more

AI classification

Knowledge representation0.90
Planning0.06
Natural language0.00
Vision0.00
Evolutionary computation0.00
Machine learning0.00
AI hardware0.00
Speech0.00

Ownership

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

assignment · 175900781

Assignors

WANG, KUO-HUA, WANG, HSING-FU

On an employer assignment, the assignors are typically the inventors.

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