Patent №
US 7,805,699
Granted
2010-09-28
Filed 2007
Owner
MENTOR GRAPHICS CORPORATION
+1 more
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11974499
A method and apparatus for determining how well a photolithographic model simulates a photolithographic printing process. A test pattern of features is printed on a wafer and the shape of the printed features is compared with the shape of simulated features produced by the model. A cost function is calculated from the comparison that quantifies how well the model simulates the photolithographic printing process.
AI classification
Ownership
MENTOR GRAPHICS CORPORATION
assignment · 206720224
SIEMENS INDUSTRY SOFTWARE INC.
merger · 565970234
Assignors
KUSNADI, IR, GRANIK, YURI
On an employer assignment, the assignors are typically the inventors.