METHOD OF ESTABLISHING A LOT GRADE SYSTEM FOR PRODUCT LOTS IN A SEMICONDUCTOR MANUFACTURING PROCESS

Patent №

US 7,908,023

Granted

2011-03-15

Filed 2008

Owner

INTERNATIONAL BUSINESS MACHINES CORPORATION

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

12013642

A method of establishing a lot grading system for lots in a semiconductor manufacturing process includes defining a new lot grade for at least one lot in the semiconductor manufacturing process. The at least one lot is has a current lot grade and the new lot grade is dependent upon the current lot grade. The new lot grade is saved in a grading referenced database and the at least one lot in the semiconductor manufacturing process is updated with the new lot grade.

PlanningG05B 19/41875Y02P 90/02

AI classification

Planning0.80
AI hardware0.02
Machine learning0.01
Natural language0.01
Knowledge representation0.01
Vision0.00
Evolutionary computation0.00
Speech0.00

Ownership

INTERNATIONAL BUSINESS MACHINES CORPORATION

assignment · 203600277

Assignors

CRAWFORD, EDWARD J., SONG, YUNSHENG, TING, TSO-HUI

On an employer assignment, the assignors are typically the inventors.

From the same owner

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