Patent №
US 8,093,556
Granted
2012-01-10
Filed 2009
Owner
CARL ZEISS NTS GMBH
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
12584283
A device and method for analyzing a sample, in particular a sample which contains low-density materials, is provided. Ions of a predefined mass and/or a predefined elementary charge are selected from a plurality of ions. The selected ions are directed onto the sample for sample preparation. An electron beam is then directed onto the prepared sample and a spatial distribution of scattered electrons is measured.
AI hardwareG01N 23/2251H01J 37/28H01J 37/3005H01J 37/3056H01J 2237/2442H01J 2237/2445H01J 2237/24485H01J 2237/2807+2 more
AI classification
AI hardware0.75
Natural language0.01
Evolutionary computation0.00
Machine learning0.00
Speech0.00
Planning0.00
Vision0.00
Knowledge representation0.00
Ownership
CARL ZEISS NTS GMBH
assignment · 235060153
Assignors
ZEILE, ULRIKE
On an employer assignment, the assignors are typically the inventors.
From the same owner
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