SEMICONDUCTOR FABRICATION FACILITY VISUALIZATION SYSTEM WITH PERFORMANCE OPTIMIZATION

Patent №

US 8,229,587

Granted

2012-07-24

Filed 2009

Owner

MURATA MACHINERY LTD.

Lab

AI components

2

kr · planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

12390395

A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Knowledge representationPlanningG05B 19/41885G05B 2219/31334G05B 2219/31466G05B 2219/45031H01L 21/67276H10P 72/0612Y02P 90/02Y02P 90/80

AI classification

Planning1.00
Knowledge representation0.70
Machine learning0.46
AI hardware0.34
Vision0.08
Natural language0.01
Evolutionary computation0.00
Speech0.00

Ownership

MURATA MACHINERY LTD.

merger · 304080548

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