Patent №
US 8,309,919
Granted
2012-11-13
Filed 2009
Owner
—
Lab
—
AI components
1
vision
Assignment
None on record
Dataset
AIPD
2023_r1 edition
Application
12352357
An object of the present invention is to provide a suitable method of observing a wafer edge by using an electron microscope. The electron microscope includes a column which can take an image in being tilted, and thus allows a wafer edge to be observed from an oblique direction.
VisionG01N 23/2251H01J 37/222H01J 37/244H01J 37/26H01J 37/28H01J 2237/24475H01J 2237/2448H01J 2237/24592+3 more
AI classification
Vision1.00
Evolutionary computation0.01
Knowledge representation0.00
Natural language0.00
Planning0.00
Machine learning0.00
AI hardware0.00
Speech0.00