Patent №
US 8,569,174
Granted
2013-10-29
Filed 2008
Owner
APPLIED MATERIALS, INC.
Lab
—
AI components
1
evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
12036174
Methods of determining a polishing endpoint are described using spectra obtained during a polishing sequence. In particular, techniques for using only desired spectra, faster searching methods and more robust rate determination methods are described.
AI classification
Evolutionary computation0.57
Machine learning0.06
Planning0.03
AI hardware0.03
Speech0.00
Natural language0.00
Vision0.00
Knowledge representation0.00
Ownership
APPLIED MATERIALS, INC.
assignment · 208180425
Assignors
LEE, HARRY Q., SWEDEK, BOGUSLAW A., BENVEGNU, DOMINIC J., DAVID, JEFFREY DRUE
On an employer assignment, the assignors are typically the inventors.
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