Patent US 8,942,463

Patent №

US 8,942,463

Granted

—

Owner

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Lab

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AI components

vision

Assignment

None on record

Dataset

AIPD

2023_r1 edition

Application

14224534

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A method for determining an image of a mask pattern in a resist coated on a substrate, the method including determining an aerial image of the mask pattern at substrate level; and convolving the aerial image with at least two orthogonal convolution kernels to determine a resist image that is representative of the mask pattern in the resist.

VisionG06T 3/10G03F 7/705G03F 7/70666G03F 7/70675G06T 7/0004

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Vision0.86

Machine learning0.05

AI hardware0.03

Natural language0.00

Evolutionary computation0.00

Speech0.00

Planning0.00

Knowledge representation0.00

Cites (16)

HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHODUS 8,447,095 · 2013 DELTA TCC FOR FAST SENSITIVITY MODEL COMPUTATIONUS 8,379,991 · 2013 METHOD AND APPARATUS FOR STATISTICAL IDENTIFICATION OF DEVICES BASED ON PARAMETRIC DATAUS 8,165,845 · 2012 METHOD, PROGRAM PRODUCT AND APPARATUS FOR GENERATING A CALIBRATED PUPIL KERNEL AND METHOD OF USING THE SAME IN A LITHOGRAPHY SIMULATION PROCESSUS 8,120,753 · 2012 MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATIONUS 7,954,072 · 2011 THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATIONUS 7,703,069 · 2010 METHOD, PROGRAM PRODUCT AND APPARATUS FOR IMPROVING CALIBRATION OF RESIST MODELS USED IN CRITICAL DIMENSION CALCULATIONUS 7,494,753 · 2009 DENSE OPCUS 7,434,199 · 2008 GRID-BASED RESIST SIMULATIONUS 7,378,202 · 2008 METHOD OF PREDICTING AND MINIMIZING MODEL OPC DEVIATION DUE TO MIX/MATCH OF EXPOSURE TOOLS USING A CALIBRATED EIGEN DECOMPOSITION MODELUS 7,242,459 · 2007 FAST MODEL-BASED OPTICAL PROXIMITY CORRECTIONUS 7,079,223 · 2006 EXTENDING THE RANGE OF LITHOGRAPHIC SIMULATION INTEGRALSUS 7,010,776 · 2006 FAST IMAGE SIMULATION FOR PHOTOLITHOGRAPHYUS 6,765,651 · 2004 METHOD AND APPARATUS FOR FAST AERIAL IMAGE SIMULATIONUS 6,738,859 · 2004 KERNEL-BASED FAST AERIAL IMAGE COMPUTATION FOR A LARGE SCALE DESIGN OF INTEGRATED CIRCUIT PATTERNSUS 6,223,139 · 2001 Patent US 7,921,383US 7,921,383

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