Patent US 8,942,840

Patent №

US 8,942,840

Granted

Owner

Lab

AI components

1

planning

Assignment

None on record

Dataset

AIPD

2023_r1 edition

Application

13743096

A system and method for manufacturing semiconductor devices is disclosed. An embodiment comprises using desired device parameters to choose an initial manufacturing recipe. Once chosen, the initial manufacturing recipe may be modified by determining and applying an offset adjustment based on previous manufacturing to tune the recipes for the particular equipment to be utilized in the manufacturing process.

PlanningG06F 30/39G05B 19/41865G05B 2219/32096Y02P 90/02

AI classification

Planning0.98
Machine learning0.38
AI hardware0.29
Knowledge representation0.12
Natural language0.01
Evolutionary computation0.00
Vision0.00
Speech0.00
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