Patent №
US 9,035,362
Granted
2015-05-19
Filed 2013
Owner
STITCHING IMEC NEDERLAND
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
13909937
A Sensor for sensing the presence of at least one fluidum in a space adjoining the sensor is disclosed. In one aspect, the sensor has a two-dimensional electron gas (2DEG) layer stack, a gate electrode overlaying at least part of the 2DEG layer stack for electrostatically controlling electron density of a 2DEG in the 2DEG layer stack and a source and a drain electrode contacting the 2DEG layer stack for electrically contacting the 2DEG, wherein a detection opening is provided in between the gate electrode and the 2DEG layer stack and wherein the detection opening communicates with the space through a detection opening inlet such that molecules of the fluidum can move from the adjoining space through the detection opening inlet into the detection opening where they can measurably alter a electric characteristic of the 2DEG.
AI classification
Ownership
STITCHING IMEC NEDERLAND
assignment · 312390683
Assignors
OFFERMANS, PETER, VITUSHINSKY, ROMAN, CALAMA, MERCEDES CREGO, BRONGERSMA, SYWERT, OFFERMANS, PETER, VITUSHINSKY, ROMAN, CALAMA, MERCEDES CREGO, BRONGERSMA, SYWERT
On an employer assignment, the assignors are typically the inventors.