CMOS STRUCTURE ON SSOI WAFER

Patent №

US 9,508,741

Granted

2016-11-29

Filed 2015

Owner

INTERNATIONAL BUSINESS MACHINES CORPORATION

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

14618397

A method of forming fins in a complimentary-metal-oxide-semiconductor (CMOS) device that includes a p-type field effect transistor device (pFET) and an n-type field effect transistor (nFET) device and a CMOS device are described. The method includes forming a strained silicon-on-insulator (SSOI) layer in both a pFET region and an nFET region, etching the strained silicon layer, the insulator, and a portion of the bulk substrate in only the pFET region to expose the bulk substrate, epitaxially growing silicon (Si) from the bulk substrate in only the pFET region, and epitaxially growing additional semiconductor material on the Si in only the pFET region. The method also includes forming fins from the additional semiconductor material and a portion of the Si grown on the bulk substrate in the pFET region, and forming fins from the strained silicon layer and the insulator in the nFET region.

PlanningH10D 87/00H10D 30/798H10D 62/822H10D 84/0193H10D 84/038H10D 84/853H10D 84/856H10D 86/011+6 more

AI classification

Planning0.53
AI hardware0.06
Vision0.02
Natural language0.00
Speech0.00
Evolutionary computation0.00
Machine learning0.00
Knowledge representation0.00

Ownership

INTERNATIONAL BUSINESS MACHINES CORPORATION

assignment · 349290884

Assignors

DORIS, BRUCE B., HE, HONG, KHAKIFIROOZ, ALI, WANG, JUNLI

On an employer assignment, the assignors are typically the inventors.

From the same owner

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