Patent №
US 9,606,440
Granted
2017-03-28
Filed 2015
Owner
THE UNIVERSITY OF QUEENSLAND
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
14770340
The present invention relates to a method for modifying line edge roughness on a lithographically-produced feature in a material, the method comprising applying a block copolymer to an area on the feature having line edge roughness, the block copolymer comprising a charged hydrophilic polymer block and a non-charged hydrophilic polymer block.
PlanningG03F 7/40C08F 293/005C08G 61/126C08L 53/00C09D 153/00G03F 7/0002C08F 2438/03G03F 7/00+1 more
AI classification
Planning0.57
Natural language0.01
Evolutionary computation0.00
Speech0.00
Machine learning0.00
AI hardware0.00
Knowledge representation0.00
Vision0.00
Ownership
THE UNIVERSITY OF QUEENSLAND
assignment · 369570878
Assignors
BLAKEY, IDRISS, CHUANG, YA-MI, WHITTAKER, ANDREW KEITH, JACK, KEVIN STANLEY
On an employer assignment, the assignors are typically the inventors.
From the same owner
A METHOD AND APPARATUS FOR PROCESSING ASTHMA PATIENT COUGH SOUND FOR APPLICATION OF APPROPRIATE THERAPYUS 12,527,493 · 2026GYROSCOPICALLY STABILISED LEGGED ROBOTUS 12,263,582 · 2025Method and System for Determining a Magnetic Susceptibility DistributionUS 11,940,519 · 2024A METHOD FOR ANALYSIS OF COUGH SOUNDS USING DISEASE SIGNATURES TO DIAGNOSE RESPIRATORY DISEASESUS 11,864,880 · 2024METHOD AND APPARATUS FOR CONTROLLING AN ELECTROCHEMICAL PROCESSUS 11,732,371 · 2023Method and Deep Quantitative Susceptibility Mapping (QSM)US 11,448,717 · 2022NEURODEGENERATIVE DISEASE TREATMENTUS 11,369,809 · 2022Mineralizing biosurfactant used for nucleating silicaUS 11,266,968 · 2022