Patent №
US 9,606,444
Granted
2017-03-28
Filed 2014
Owner
CARL ZEISS SMS LTD.
Lab
—
AI components
1
evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
14238803
The invention relates to a method for locally deforming an optical element for photolithography in accordance with a predefined deformation form comprising: (a) generating at least one laser pulse having at least one laser beam parameter; and (b) directing the at least one laser pulse onto the optical element, wherein the at least one laser beam parameter of the laser pulse is selected to yield the predefined deformation form.
AI classification
Evolutionary computation0.62
Natural language0.02
Machine learning0.00
AI hardware0.00
Speech0.00
Planning0.00
Vision0.00
Knowledge representation0.00
Ownership
CARL ZEISS SMS LTD.
assignment · 332480174
Assignors
DMITRIEV, VLADIMIR, STERN, URI
On an employer assignment, the assignors are typically the inventors.
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