INSPECTION METHOD

In an inspection method, an inspection region of a sample is divided into a plurality of stripe regions, and is divided into a plurality of groups so that a plurality of continuously arranged stripe regions constitutes one group. An optical image of a graphic pattern arranged in a stripe region of one of the groups is acquired while moving a stage in a longitudinal direction of the stripe region. The stage is then moved in a lateral direction of the stripe region. An optical image of a graphic pattern arranged in a stripe region of a group different from one of the groups in which the optical image is acquired, and in a stripe region not continuous to the stripe region whose optical image is acquired immediately before the movement in the lateral direction, is acquired while moving the stage in the longitudinal direction of the stripe region.