USING RADIAL BASIS FUNCTION NETWORKS AND HYPER-CUBES FOR EXCURSION CLASSIFICATION IN SEMI-CONDUCTOR PROCESSING EQUIPMENT
Patent №
US 9,852,371
Granted
2017-12-26
Filed 2016
Owner
APPLIED MATERIALS, INC.
Lab
—
AI components
3
ml · kr · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
15043229
A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.
AI classification
Ownership
APPLIED MATERIALS, INC.
assignment · 377290750
Assignors
CANTWELL, DERMOT
On an employer assignment, the assignors are typically the inventors.