DETERMINING SPAN EXPANSION OR CONTRACTION BETWEEN FEATURES AND STRUCTURES IN THIN FILMS

A method for measuring a distance between features of a sample, according to one embodiment, includes moving a precision stage having the sample thereon for positioning a first feature of the sample in a field of view of an imaging device. The imaging device is instructed to generate a first image of the first feature of the sample. The sample is moved a defined distance using the precision stage. The imaging device is instructed to generate a second image of a second feature of the sample at the defined distance. The first image and the second image are used to determine an actual distance between the first feature and the second feature. A product, according to one embodiment, includes a thin film structure having a plurality of elements, and at least two features dedicated for enabling measurement therebetween. Each feature is positioned at a known position relative to a respective one of the elements.