Patent №
US 6,041,270
Granted
2000-03-21
Filed 1997
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
08985470
A method of manufacturing semiconductor wafers using a simulation tool to determine a set of predicted wafer electrical test measurements that are compared to a set of target wafer electrical test measurements to obtain a set of optimized process parameters for the equipment for the next process. The optimized process parameters are compared to the equipment characteristics for the equipment of the next process and the process parameters for the next process are automatically adjusted.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 88940172
Assignors
STEFFAN, PAUL J., CHEN, MING CHUN
On an employer assignment, the assignors are typically the inventors.