METHOD OF LEARNING A KNOWLEDGE-BASED DATABASE USED IN AUTOMATIC DEFECT CLASSIFICATION

Patent №

US 7,623,698

Granted

2009-11-24

Filed 2006

Owner

VISTEC SEMICONDUCTOR SYSTEMS GMBH

+1 more

Lab

—

AI components

ml · vision · planning · hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10564454

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The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to this method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.

Machine learning Vision Planning AI hardwareG01N 21/9501G06T 7/0004G01N 2021/8854G06T 2207/30148

Google Patents

AI classification

Planning1.00

Vision1.00

Machine learning1.00

AI hardware0.92

Knowledge representation0.11

Natural language0.09

Speech0.01

Evolutionary computation0.00

Ownership

VISTEC SEMICONDUCTOR SYSTEMS GMBH

assignment · 179050043

KLA-TENCOR MIE GMBH

assignment · 233290686

Assignors

SOENKSEN, DIRK, FRIEDRICH, RALF, DRAEGER, ANDREAS, SCHUPP, DETLEF, VAN LUU, THIN, LANGER, WOLFGANG

On an employer assignment, the assignors are typically the inventors.

From the same owner

METHOD AND APPARATUS FOR PROCESSING THE IMAGE DATA OF THE SURFACE OF A WAFER RECORDED BY AT LEAST ONE CAMERAUS 8,264,534 · 2012 METHOD FOR THE OPTICAL INSPECTION AND VISUALIZATION OF OPTICAL MEASURING VALUES OBTAINED FROM DISK-LIKE OBJECTSUS 8,200,003 · 2012 METHOD FOR INSPECTING A SURFACE OF A WAFER WITH REGIONS OF DIFFERENT DETECTION SENSITIVITYUS 8,200,004 · 2012 APPARATUS AND METHOD FOR INSPECTING MICRO-STRUCTURED DEVICES ON A SEMICONDUCTOR SUBSTRATEUS 8,154,718 · 2012 APPARATUS AND METHOD FOR MEASURING STRUCTURES ON A MASK AND OR FOR CALCULATING STRUCTURES IN A PHOTORESIST RESULTING FROM THE STRUCTURESUS 8,102,541 · 2012 DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFER AND USE OF THE DEVICE IN INSPECTION SYSTEM FOR WAFERSUS 8,089,622 · 2012 METHOD FOR OPTICAL INSPECTION, DETECTION AND VISUALIZATION OF DEFECTS ON DISK-SHAPED OBJECTSUS 8,090,185 · 2012 METHOD FOR DETERMINING THE POSITION OF THE EDGE BEAD REMOVAL LINE OF A DISK-LIKE OBJECTUS 7,973,931 · 2011

Cites (7)

DEFECT INSPECTION SYSTEMUS 6,973,209 · 2005 SYSTEM AND METHOD FOR CLASSIFYING AN ANOMALYUS 6,483,938 · 2002 CONTEXT-BASED AUTOMATED DEFECT CLASSIFICATION SYSTEM USING MULTIPLE MORPHOLOGICAL MASKSUS 6,456,899 · 2002 FAB YIELD ENHANCEMENT SYSTEMUS 6,408,219 · 2002 METHOD AND SYSTEM FOR IDENTIFYING DEFECTS IN A SEMICONDUCTORUS 6,292,582 · 2001 AUTOMATIC KNOWLEDGE DATABASE GENERATION FOR CLASSIFYING OBJECTS AND SYSTEMS THEREFORUS 6,104,835 · 2000 Patent US 6,792,367US 6,792,367

Related research

A Continual Learning Framework for Adaptive Defect Classification and InspectionarXiv Iterative knowledge discovery for fault detection in manufacturing systemsOpenAlex Shared Knowledge Base for Multi Deep Learning in Defect DetectionOpenAlex Toward Lifelong Learning for Industrial Defect Classification: A Proposed FrameworkSemantic Scholar Active Semi-supervised Defect CategorizationSemantic Scholar

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