FAB YIELD ENHANCEMENT SYSTEM

Patent №

US 6,408,219

Granted

2002-06-18

Filed 1998

Owner

APPLIED MATERIALS, INC.

Lab

AI components

4

ml · vision · kr · planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09075254

A yield enhancement system organizes defect classification and attribute information into a global classification scheme. The global classes are used to identify defect sources and to generate inspection and review plans. The system accumulates defect information in a database and continually refines the information to improve the accuracy of the classification assignments and the identification of the defect sources.

AI classification

Planning1.00
Vision0.99
Machine learning0.99
Knowledge representation0.99
Natural language0.07
Evolutionary computation0.04
AI hardware0.01
Speech0.00

Ownership

APPLIED MATERIALS, INC.

assignment · 94330705

Assignors

YARON, GAD, LAMEY, PATRIC, MAIMON, AMOTZ

On an employer assignment, the assignors are typically the inventors.

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