YIELD BASED RETARGETING FOR SEMICONDUCTOR DESIGN FLOW

A method for modifying an integrated circuit design layout is presented and can include placing a plurality of target points in the proximity of a polygon representing a portion of the integrated circuit design; modifying the target point placement for some or all of the placed target points; fitting a curve to the target points; and redefining the portion of the integrated circuit as a contour defined by the fitted curve to modify the design layout. In some applications the modified design layout can be used as a target for an optical proximity correction algorithm or for other purposes.