SYSTEM FOR TESTING SEMICONDUCTORS

Patent №

US 7,940,069

Granted

2011-05-10

Filed 2009

Owner

CASCADE MICROTECH, INC.

Lab

—

AI components

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

12653574

A testing system that includes an plural imaging devices capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.

PlanningG01R 31/2891

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AI classification

Planning0.79

Vision0.40

Evolutionary computation0.36

Natural language0.01

Knowledge representation0.00

Machine learning0.00

AI hardware0.00

Speech0.00

Ownership

CASCADE MICROTECH, INC.

assignment · 237100066

Assignors

ANDREWS, PETER, HESS, DAVID

On an employer assignment, the assignors are typically the inventors.

From the same owner

FOCUSING OPTICAL SYSTEMS AND METHODS FOR TESTING SEMICONDUCTORSUS 9,435,858 · 2016 OPTICALLY ENHANCED DIGITAL IMAGING SYSTEMUS 9,245,317 · 2016 METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARDUS 7,733,108 · 2010 SYSTEM FOR TESTING SEMICONDUCTORSUS 7,656,172 · 2010 GUARDED TUB ENCLOSUREUS 7,639,003 · 2009 INTERFACE FOR TESTING SEMICONDUCTORSUS 7,535,247 · 2009 BLUR DETECTION SYSTEMUS 7,181,082 · 2007 PROBE STATIONUS 6,777,964 · 2004

Cites (63)

SYSTEM FOR TESTING SEMICONDUCTORSUS 7,656,172 · 2010 INTERFACE FOR TESTING SEMICONDUCTORSUS 7,535,247 · 2009 PROBE DESIGNING APPARATUS AND PROBE DESIGNING METHODUS 7,035,738 · 2006 PROBE MARK READING DEVICE AND PROBE MARK READING METHODUS 7,026,832 · 2006 ELECTRIC CONDUCTIVITY WATER PROBEUS 7,019,541 · 2006 APPARATUS AND METHOD FOR THE TESTING OF CIRCUIT BOARDS, AND TEST PROBE FOR THIS APPARATUS AND THIS METHODUS 7,015,711 · 2006 NEEDLE FIXTURE OF A PROBE CARD IN SEMICONDUCTOR INSPECTION EQUIPMENT AND NEEDLE FIXING METHOD THEREOFUS 6,900,653 · 2005 PROCESS AND APPARATUS FOR ADJUSTING TRACESUS 6,862,727 · 2005 METHOD OF DESIGNING , FABRICATING, TESTING AND INTERCONNECTING AN IC TO EXTERNAL CIRCUIT NODESUS 6,845,491 · 2005 TEST ASSEMBLY INCLUDING A TEST DIE FOR TESTING A SEMICONDUCTOR PRODUCT DIEUS 6,825,052 · 2004 SYSTEM AND METHOD OF SENDING MESSAGES TO A GROUP OF ELECTRONIC PRICE LABELSUS 6,816,840 · 2004 MASSIVELY PARALLEL INTERFACE FOR ELECTRONIC CIRCUITSUS 6,812,718 · 2004 METHODOLOGY AND APPARATUS USING REAL-TIME OPTICAL SIGNAL FOR WAFER-LEVEL DEVICE DIELECTRICAL RELIABILITY STUDIESUS 6,788,093 · 2004 PROBE STATIONUS 6,777,964 · 2004 MULTI-PIXEL METHODS AND APPARATUS FOR ANALYSIS OF DEFECT INFORMATION FROM TEST STRUCTURES ON SEMICONDUCTOR DEVICESUS 6,771,806 · 2004 SOLID-STATE IMAGE SENSOR AND ANALYSIS SYSTEM USING THE SAMEUS 6,765,609 · 2004 APPARATUS FOR DETECTING DEFECT IN DEVICE AND METHOD OF DETECTING DEFECTUS 6,734,687 · 2004 THERMAL LUMINESCENCE LIQUID MONITORING SYSTEM AND METHODUS 6,731,804 · 2004 REAL-TIME PHOTOEMISSION DETECTION SYSTEMUS 6,724,928 · 2004 METHOD AND SYSTEM FOR DESIGNING A PROBE CARDUS 6,714,828 · 2004 METHODS AND APPARATUS FOR DETERMINING THE RELATIVE POSITIONS OF PROBE TIPS ON A PRINTED CIRCUIT BOARD PROBE CARDUS 6,710,798 · 2004 SURROUND SURVEILLANCE SYSTEM FOR MOBILE BODY, AND MOBILE BODY, CAR, AND TRAIN USING THE SAMEUS 6,693,518 · 2004 PROCESS AND APPARATUS FOR FINDING PAHTS THROUGH A ROUTING SPACEUS 6,678,876 · 2004 CALIBRATING A TEST SYSTEM USING UNKNOWN STANDARDSUS 6,643,597 · 2003 AUTOMATIC FOCUSING SYSTEM FOR SCANNING ELECTRON MICROSCOPE EQUIPPED WITH LASER DEFECT DETECTION FUNCTIONUS 6,621,082 · 2003

and 38 more

Cited by (3)

TEST SYSTEM HAVING DISTRIBUTED RESOURCESUS 10,677,815 · 2020 TEST FIXTUREUS 9,977,052 · 2018 VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERSUS 9,735,034 · 2017

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