Layout Optimization of a Main Pattern and a Cut Pattern

Patent №

US 9,501,601

Granted

2016-11-22

Filed 2013

Owner

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Lab

AI components

2

planning · evo

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

14059328

A method for feature pattern modification includes extracting both a main pattern and a cut pattern from a design pattern, the main pattern being laid out under a set of process guidelines that improve the process window during formation of the main pattern, and modifying at least one of: the main pattern and the cut pattern if either feature pattern is in violation of a layout rule.

PlanningEvolutionary computationG06F 30/398G03F 1/70G06F 30/39G06F 30/392H10D 89/10H10P 76/00H10W 20/43G03F 1/36+2 more

AI classification

Planning1.00
Evolutionary computation0.82
Vision0.12
Knowledge representation0.01
AI hardware0.00
Natural language0.00
Speech0.00
Machine learning0.00

Ownership

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

assignment · 314470040

Assignors

CHANG, SHIH-MING, LU, KUEI-LIANG, CHANG, SHIH-MING, LU, KUEI-LIANG

On an employer assignment, the assignors are typically the inventors.

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