A SYSTEM FOR EXTRACTION OF KEY PROCESS PARAMETERS FROM FAULT DETECTION CLASSIFICATION TO ENABLE WAFER PREDICTION
Patent №
US 7,974,728
Granted
2011-07-05
Filed 2008
Owner
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Lab
—
AI components
3
ml · planning · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
12026361
A system, method, and computer readable medium for extracting a key process parameter correlative to a selected device parameter are provided. In an embodiment, the key process parameter is determined using a gene map analysis. The gene map analysis includes grouping highly correlative process parameter and determining the correlation of a group to the selected device parameter. In an embodiment, the groups having greatest correlation to the selected device parameter are displayed in a correlation matrix and/or a gene map.
AI classification
Ownership
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
assignment · 204670758
Assignors
LIN, CHUN-HSIEN, KO, FRANCIS, ZUO, KEWEI, LO, HENRY, WANG, JEAN
On an employer assignment, the assignors are typically the inventors.